X-ray Mask with SiC Membrane for LIGA Process

Process Simulation of Moving Mask Deep X-Ray Lithography

This paper presents a newly developed 3-Dimensional (3D) simulation system for Moving Mask Deep X-ray Lithography (MDXL) process, and its validation. The simulation system named X-ray Lithography Simulation System for 3-Dimensional Fabrication (X3D) is tailored to simulate a fabrication process of 3D microstructures by MDXL. X3D consists of three modules: mask generation, exposure and developme...

X-ray spectrometer with a low-cost SiC photodiode

A low-cost Commercial-Off-The-Shelf (COTS) 4H-SiC 0.06 mm2 UV p-n photodiode was coupled to a low-noise charge-sensitive preamplifier and used as photon counting X-ray spectrometer. The photodiode/spectrometer was investigated at X-ray energies from 4.95 keV to 21.17 keV: a Mo cathode X-ray tube was used to fluoresce eight high-purity metal foils to produce characteristic X-ray emission lines w...

Nano-crystalline Diamond Films for X-ray Lithography Mask

Fabrication of Microfluidic Device for Quantitative Monitoring of Algal Cell Behavior Using X-ray LIGA Technology

In this paper, a simple microfluidic device for monitoring algal cell behavior is proposed. An array of algal microwells is fabricated by PDMS soft-lithography using X-ray LIGA mold, placed on a glass substrate. Two layers of replicated PDMS and substrate are attached by oxygen plasma bonding, creating a microchannel for the microfluidic system. Algal cell are loaded into the microfluidic devic...

X-ray fluorescence microtomography on a SiC nuclear fuel shell

TRISO fuel particles, used in high-temperature gas-cooled reactors (HTGR) are composite structures with a nuclear fuel kernel surrounded by alternating layers designed to contain fission products and compensate for radiation damage. As shown in Figure 1, a typical fuel particle contains an inner kernel of nuclear fuel, a low-density buffer layer of pyrocarbon, a dense layer of pyrocarbon coatin...